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Description

CVD Systems --- Plasm Enhanced (PECVD)High Vacuum Tube Furnace Part #: PECVD VTF1200D80 Double shell structure for good surface cooling Furnace mounted on horizontal position with sliding trail Maximum temperature 1200 C Continuous working (long term) temperature <1100 C Programmable temperature control with 30 segments Temperature control + 1. 0 C Two end vacuum flanges, fittings installed Heating zone length 440mm (Constant temperature zone 12inch) Heating elements 1200C grade Al Fe Cr

Small Jars

Head diameter 10/8/6mm

Advanced temperature control system using Siemens PLC and Delta module

Heating Position

Air filter for dust removal

Automatic pressure control function to turn on/off vacuum pump

1125mL/1000g

leakage tested

glass Glass collection jar 1 LSD-H1500-GJAR1 D3inch

Speed control accuracy +/-1RPM

both speed an RCFAuto balancing

One-year standard warranty